Core Facility "Functional Processing"

Ridge-type Bragg grating waveguide structures on COC foil for sensor application (Bragg grating period: 205 nm, waveguide: 2 µm in width and 2.4 µm in height) © CF 2

Manufacturing technique for bioinspired materials with focus on nanolithography, polymer foil technology, and additive manufacturing

• In order to support the research projects running in FIT, a powerful core facility for functional design and efficient manufacturing of (micro-)systems and adaptive bioinspired materials will be established.
• The Core Facility "Functional Processing" concentrates particularly on the fabrication of nano- and micro-structures by electron-beam-lithography, UV-NIL (UV-nanoimprint-lithography), as well as HE-NIL (hot-embossing-nanoimprint-lithography) technologies. Besides of that, different kinds of additive manufacturing technologies will be further developed for special applications on polymer foils.
• A list of the devices can be found under "Technical equipment".
• To use the devices, please observe the operating and user rules (in German) and the respective explanations in English, and the device fees.

• Scientific head: Prof. Dr. Claas Müller
• Responsible manager: Prof. Dr. Jing Becker